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The Critical Environment In-tool Ionizing Blower Model 5822i is designed to meet small-footprint ionizer requirements in automated process tools, offering exceptional performance in hard disk drive manufacturing and backend semiconductor environments.
The ionizer maintains a ± 1 volt or better balance with an optional external sensor or ± 3 volts or better balance without a sensor. An internal automatic balance correction system ensures your target is ionized accurately, presenting a significant time and cost savings.
A collimator installed over the fan directs precisely balanced ionized air to the target without taking up valuable room in your environment. Internal circuitry suited for high humidity applications and 24 VDC input voltage makes the Model 5822i the standard choice for environments that need reliable, quality ESD protection in sensitive environments.
Features & Benefits
• ± 1 volt or better balance ( ± 3 volts or better without external sensor) .
• Remotely placed control box.
• Unique Hydro Wave* bearing fan.
• Facility Monitoring System ( FMS) connection and audible alarm.
• Provides the best corona-based ESD protection available for maximizing yields.
• Separate control box allows greater flexibility in mounting while maintaining excellent in-tool performance.
• Fan is optimized to provide long service while minimizing any particle generation.
• Faster response to ionization failure with notification through tool or facility monitoring system.